Description:
The principle is to use the technology of vacuum arc discharge counting for the evaporation source, that is, the evaporation source (cathode) is ignited in a vacuum environment, and a self-sustaining arc discharge is formed between the anode and the anode, and the ions of the cathode material are released from the glow point of the cathode arc. Due to the local concentration of the current, the generated Joule heat causes the cathode material to be locally explosively plasmaized, combined with the reactive gas under the action of the working bias, and deposited on the surface of the workpiece to form a plated film.
Applicability:
Suitable for small-scale processing and experiments, the equipment is suitable for the surface of workpieces such as plastic, glass, ceramics, PC, acrylic, film and other metal parts, plastic workpieces, glass inside and outside coating, glass lenses, electro-acoustic components, magnetic devices and other workpiece surfaces Coating decorative film, alloy film, electrical film or optical film, etc.
Features:
The vacuum coating machine has the characteristics of beautiful appearance, compact structure, small footprint and easy maintenance. It can realize automatic control or manual control, simple and reliable operation, and can automatically complete various coating process parameters. It adopts numerical control method for coating, complete functions and strong adaptability.
Technical parameter:
(1) Ultimate vacuum 5.0×10-4pa (clean and no-load new machine)
(2) Pumping speed: from the atmosphere to 5×10-2pa≤6 minutes (no-load clean room)
(3) Total power/average power: DC sputtering 2KW/RF sputtering 2KW, bias power supply 2KW.
(4) Dimensions: 1200×1700×1800 mm (L×W×H)
(5) Total area of equipment: 3m2
(6) Use voltage: 380V 50Hz (10KW)
Main configuration:
No
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Name
|
Specification
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Quantity
|
Unit
|
1
|
Vacuum unit
|
2X-15L Vacuum Pump
|
1
|
Set,Directly connected vacuum pump
|
250/160 molecular pump
|
1
|
Set,
220V/0.5KW
|
2
|
Vacuum chamber
|
Coating chamber D 500mm*550mm, the vacuum furnace is made of stainless steel and equipped with an observation window. Furnace shell and door surface spray paint treatment.
|
complete
|
set
|
3
|
Valve pipeline
|
Pipes, vacuum valves
|
complete
|
set
|
4
|
Turn frame system
|
Made of stainless steel, micro-motor stepless speed change, the original shaft rotates 0-60 degrees
|
1
|
set
|
5
|
Measurement control instrument
|
Crystal-controlled film thickness meter
|
1
|
set
|
Using composite vacuum measuring instrument, this instrument is equipped with automatic conversion from low vacuum to vacuum measurement
|
1
|
set
|
6
|
Coating system
|
Magnetron sputtering coating:
1. Equipped with 4 sets of 3-inch confocal sputtering targets.
2. Equipped with a 2KWDC DC film power supply.
3. Equipped with a 2KWRF RF coating power supply.
4. Equipped with 3 sets of gas flow controller and gas flow valve (use gas: Ar, O2, N2).
|
complete
|
set
|
7
|
Electrical control system
|
The main electrical components are made of Inovance, Schneider, Chint and other brands of electrical appliances, and one electrical control cabinet
|
complete
|
set
|
8
|
Bias supply
|
RF heating 2KW
|
1
|
set
|
9
|
Protective function
|
The equipment has the functions of water pressure loss, gas pressure loss, automatic alarm and interlock function.
|
complete
|
set
|
10
|
Equipment control system
|
10 inch touch screen, programming controller PLC
|
1
|
set
|
Items prepared by the buyer:
1. Air compressor, air pressure: 0.4-0.6Mpa, air volume: 0.3㎡/h
2. Water cooling tower, water temperature 20℃, cooling capacity 2㎡/h, water supply pressure: 0.2Mpa
3. Power supply: three-phase four-wire system, 380V, 50Hz 10KW
4. Water, electricity and gas sources are connected to the input of each interface of the machine.
5. Decoration of coating workshop. (The main unit covers an area of 2m (width) x 2m (depth)
6. Plating material required for test machine
7. Cage frame and fixture
8. Pre-plating and post-plating processing equipment